Japan APOLLOWAVE Manual probe station Alpha150

 6-inch Manual probe station
- ( 150 x 150 mm ) X-Y chuck stage Quick moving
- Platen up/down fine movement 10 mm
- Platen up/down quickly movement (0, 0.3, 5 mm)
- α series manual probe system is easy to use and can be used for various measurement applications
- Chip fixing is possible
- With XY coarse movement and fine adjustment using micrometer that can be quickly positioned by air bearing design, reliable alignment is possible
- Z movement of the platen has coarse movement that can be operated with a lever, and fine movement that can be adjusted with micrometer
- User-friendly design