Japan APOLLOWAVE Manual probe station Alpha100

4-inch Manual probe station 
- ( 100 x 100 mm ) X-Y chuck stage Quick moving
- Platen up/down fine movement 10 mm
- Platen up/down quickly movement (0, 0.3, 5 mm)
- For accurate and reliable IV/CV, RF and measurements
- A compact prober which corresponds to the wafer size up to 4 inch
- With XY coarse movement and fine adjustment using micrometer that can be quickly positioned by air bearing design, reliable alignment is possible
- Z movement of the platen has coarse movement that can be operated with a lever, and fine movement that can be adjusted with micrometer
- User-friendly design