8-inch Semi-automated wafer probe station
1. Chuck stage XY axis (Air suspension and scale are equipped)
Stage travel: 220 (X) x 250 (Y) mm, Control resolution ability: 0.1um, Scale resolution ability: 0.1um, Repeatability: within plus-minus 2um, Accuracy: within plus-minus 5um, Moving speed: MAX 30mm/sec
2. Chuck stage Z axis
stage travel: plus-minus 30mm, Resolution ability: 0.1um, Repeatability: within plus-minus 2um, Moving speed: Max 25mm/sec
3. Chuck stage T axis
Stage travel: plus-minus 6 degree, Resolution ability: 0.001 degree, Rolling speed: Max. 1 degree/sec
Including: Microscope 0~4.5X, CCD + 15” Monitor, PC control software, Table