Semi-Auto Probe Station

Japan APOLLOWAVE Semi-automated Probe Systems AP-150

Japan APOLLOWAVE Semi-automated Probe Systems AP-150

Japan APOLLOWAVE 6-inch Semi-automated wafer probe station AP-150
  • 6-inch Semi Auto probe station AP-150.jpg
  • AP150-4.jpg
  • AP150-2.jpg
DETAIL
6-inch Semi-automated wafer probe station
- Corresponding to various setting such as low leak measurement, High voltage/High current measurement,High frequency
- Compact design with 500m depth
- Control software with operational good performance
- Option line up <probe alignments for verticality probe,auto alignment function>

<Measurement example>
fA level low leak measurement
High power measurement (more than 3kV, 100A)
High frequency measurement for millimeter wave

Enable to have high performance measurement which have comparable level as tester’s spec with using triaxial probe, HV triaxial
probe and HC probe together. Accommodate millimeter wave with using Allstron’s RF probe. Calibration kit stage is also equipped as standard.

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